Coupled electrostatic-structural interaction needs to be modeled for designing many electrostatically actuated devices such as MEMS switches, accelerometers and comb-drives. The models for such devices must include an assembly of components and the air gaps between them. The electrostatic fields are generated in the air gaps and this field produces electrostatic forces which act on the structural components causing deformation and strains. Generating an appropriate mesh for such an assembly of regions with different material properties can be cumbersome. In this paper, we have developed an immersed boundary approach where the geometry is defined using the equations of the boundary and is immersed in a uniform background mesh. The loads and boundary conditions are imposed using the implicit boundary method since the nodes of the background mesh are not guaranteed to be on the boundaries. This approach is verified by applying it to commonly used examples.

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