Planar-type voice coil motor (VCM) is a key component in ultra-precision motion of fine stage of lithography machine. The reliability-based design optimization (RBDO) method given in this work provides a novel criterion to ensure performance of Lorentz motors by evaluating the reliability of force constant. To solve the reliability based design optimization problem in discrete space with the speed of decoupled loop in sequential optimization and reliability assessment (SORA) for global solution, a Sequential Particle Swarm Optimization and Reliability Assessment method is proposed. The reliability boundary shift is put into penalty function for constrained optimization in fitness evaluation of particle swarm optimization (PSO). The presented optimization design model, the geometric parameters of the studied Planar-type VCM in finite element model are treated as design variables whereas the thrust force constant is an output quantity of interests. By using electromagnetic analysis, the desired requirements of Lorentz motors are verified.
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ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 4–7, 2013
Portland, Oregon, USA
Conference Sponsors:
- Design Engineering Division
- Computers and Information in Engineering Division
ISBN:
978-0-7918-5599-7
PROCEEDINGS PAPER
Sequential Particle Swarm Optimization and Reliability Assessment of Planar-Type Voice Coil Motor Available to Purchase
Haikun Wang,
Haikun Wang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
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Hong-Zhong Huang,
Hong-Zhong Huang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
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Huanwei Xu,
Huanwei Xu
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
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Zhonglai Wang,
Zhonglai Wang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
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Xiaoling Zhang
Xiaoling Zhang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
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Haikun Wang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
Hong-Zhong Huang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
Huanwei Xu
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
Zhonglai Wang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
Xiaoling Zhang
University of Electronic Science and Technology of China, Chengdu, Sichuan, China
Paper No:
DETC2013-12979, V008T12A002; 9 pages
Published Online:
February 12, 2014
Citation
Wang, H, Huang, H, Xu, H, Wang, Z, & Zhang, X. "Sequential Particle Swarm Optimization and Reliability Assessment of Planar-Type Voice Coil Motor." Proceedings of the ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 8: 22nd Reliability, Stress Analysis, and Failure Prevention Conference; 25th Conference on Mechanical Vibration and Noise. Portland, Oregon, USA. August 4–7, 2013. V008T12A002. ASME. https://doi.org/10.1115/DETC2013-12979
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