The Oscillatory Behavior of Doubly Clamped Microgyroscopes Under Electrostatic Actuation and Detection

In MEMS gyroscopes, it is essential to use matched resonance frequencies of the drive and sense vibrational modes for improving the sensitivity. For this end, the natural frequencies can be tuned by voltages. In this study, a new model is utilized to determine the natural frequencies of the doubly clamped beam microgyroscope. In the model, nonlinear electrostatic forces, fringing fields and mid-plane stretching of the beam are considered. The system is actuated and sensed by electrostatic force and its natural frequencies and stiffness are detuned by DC voltages. The oscillatory problem of the gyroscope is analytically solved versus DC voltages for different design parameters.