This paper investigates electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers biosensors using the Reduced Order Model (ROM) method. Forces acting on the CNT are electrostatic, damping, and van der Waals. The electrostatic actuation is given by soft AC voltage. Van der Waals forces are significant for gaps between the CNT and a ground plate lower than 100 nm. Both forces electrostatic and van der Waals are nonlinear. CNT undergoes nonlinear parametric dynamics. ROM is used to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude response is found in the case of primary resonance and compared to the Method of Multiple Scales (MMS). The CNT biosensor is to be used for mass detection applications.

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