In this study we present a theoretical and experimental investigation of a microelectromechanical system (MEMS). The device is constituted of a clamped-clamped polysilicon microbeam electrostatically and electrodynamically actuated. The microbeam has imperfections in the geometry, which are related to the microfabrication process. Using a laser Doppler vibrometer, experimental testing based on forward and backward sweeps is conducted in a neighborhood of the first symmetric natural frequency. Our aim is that of introducing a simple mechanical model, which, despite the inevitable approximations, is able to catch and predict the most relevant aspects of the device response. Many parameters of the microbeam are unknown. Their values are identified by developing a parametric analysis, which is based on matching the experimental natural frequencies and the experimental frequency response diagrams. Extensive simulations are performed. Theoretical and experimental frequency responses are analyzed in detail at increasing values of electrodynamic excitation. A satisfactory concurrence of results is achieved, not only at low electrodynamic loads, but also at higher ones, when the escape (dynamic pull-in) becomes impending. This confirms that, despite the apparent simplicity, the proposed theoretical model is able to simulate the complex dynamics of the device accurately and properly.
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ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 12–15, 2012
Chicago, Illinois, USA
Conference Sponsors:
- Design Engineering Division
- Computers and Information in Engineering Division
ISBN:
978-0-7918-4504-2
PROCEEDINGS PAPER
An Imperfect Microbeam Electrically Actuated: Experimental Investigation and Parameter Identification Available to Purchase
Laura Ruzziconi,
Laura Ruzziconi
Polytechnic University of Marche, Ancona, Italy
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Ahmad M. Bataineh,
Ahmad M. Bataineh
State University of New York at Binghamton, Binghamton, NY
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Mohammad I. Younis,
Mohammad I. Younis
State University of New York at Binghamton, Binghamton, NY
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Stefano Lenci
Stefano Lenci
Polytechnic University of Marche, Ancona, Italy
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Laura Ruzziconi
Polytechnic University of Marche, Ancona, Italy
Ahmad M. Bataineh
State University of New York at Binghamton, Binghamton, NY
Mohammad I. Younis
State University of New York at Binghamton, Binghamton, NY
Stefano Lenci
Polytechnic University of Marche, Ancona, Italy
Paper No:
DETC2012-70505, pp. 87-94; 8 pages
Published Online:
September 9, 2013
Citation
Ruzziconi, L, Bataineh, AM, Younis, MI, & Lenci, S. "An Imperfect Microbeam Electrically Actuated: Experimental Investigation and Parameter Identification." Proceedings of the ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference. Chicago, Illinois, USA. August 12–15, 2012. pp. 87-94. ASME. https://doi.org/10.1115/DETC2012-70505
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