Most electrostatic actuators fabricated by MEMS technology require high actuation voltage and suffer from the pull-in phenomenon that limits the operation range. We present an amplitude-modulated resonant drive circuit to drive electrostatic actuators at much lower supply voltage than that of conventional actuators to extend their operation range. Analytical and numerical models facilitate stability analysis of electrostatic actuators coupled with the resonant drive circuit. We study the impact of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range of electrostatic actuators. Furthermore, we present a new method to measure the displacement of electrostatic actuators by sensing the phase delay of the actuation voltage with respect to the input voltage. This measurement method allows us to easily incorporate feedback control into existing electrostatic actuators without any modification to the actuator itself.
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ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
August 12–15, 2012
Chicago, Illinois, USA
Conference Sponsors:
- Design Engineering Division
- Computers and Information in Engineering Division
ISBN:
978-0-7918-4504-2
PROCEEDINGS PAPER
Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit
Sangtak Park,
Sangtak Park
University of Waterloo, Waterloo, ON, Canada
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Eihab Abdel-Rahman
Eihab Abdel-Rahman
University of Waterloo, Waterloo, ON, Canada
Search for other works by this author on:
Sangtak Park
University of Waterloo, Waterloo, ON, Canada
Eihab Abdel-Rahman
University of Waterloo, Waterloo, ON, Canada
Paper No:
DETC2012-71268, pp. 119-126; 8 pages
Published Online:
September 9, 2013
Citation
Park, S, & Abdel-Rahman, E. "Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit." Proceedings of the ASME 2012 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 5: 6th International Conference on Micro- and Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference. Chicago, Illinois, USA. August 12–15, 2012. pp. 119-126. ASME. https://doi.org/10.1115/DETC2012-71268
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