The atomic force microscope (AFM) is a high-resolution measurement tool for sample topography and material properties in nano-scale and micro-scale research. The dynamics of the cantilever probe in AFM is affected by the intrinsically nonlinear interaction between the probe tip and the sample. Previous works have shown that in off-resonance excited intermittent-contact AFM, a period-doubling bifurcation occurs as a result of the nonlinearity. The sub-harmonic amplitude of the response is used as the source of contrast to measure the effective modulus of the sample. This paper further investigates the performance of this proposed measurement method on more complicated 1-D samples and 2-D samples. The nonlinear relationship between the sub-harmonic amplitude and the tip-sample separation raises new challenges to the traditional PI controller. The design of the controller is revisited and modified in this paper to improve measurement accuracy.
- Design Engineering Division and Computers and Information in Engineering Division
Measuring Effective Modulus With Bifurcation Based Atomic Force Microscope Method
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Huang, W, & Dick, AJ. "Measuring Effective Modulus With Bifurcation Based Atomic Force Microscope Method." Proceedings of the ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference. Washington, DC, USA. August 28–31, 2011. pp. 481-490. ASME. https://doi.org/10.1115/DETC2011-47503
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