This paper presents a stability model for predicting the snap-in behavior of electrostatic comb-drive actuators, while taking into account the bearing direction stiffness and error motion of the associated flexure suspension. Error motions typically arise from the flexure suspension kinematics or manufacturing variations. The presented model allows for a more accurate determination of the comb-drive actuator’s motion range, limited by snap-in instability, as well as robustness against this instability over the motion range. Ultimately, this model is used as an effective design tool to help evaluate several existing and new flexure suspension geometries for range and robustness.
Volume Subject Area:
34th Annual Mechanisms and Robotics Conference
Topics:
Actuators,
Design,
Stability,
Bending (Stress),
Errors,
Robustness,
Bearings,
Kinematics,
Manufacturing,
Stiffness
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by ASME
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