In this paper, primary resonance of a double-clamped microbeam has been investigated. The Microbeam is predeformed by a DC electrostatic force and then driven to vibrate by an AC harmonic electrostatic force. Effects of midplane stretching, axial loads and damping are considered in modeling. Galerkin’s approximation is utilized to convert the nonlinear partial differential equation of motion to a nonlinear ordinary differential equation. Afterward, a combination of homotopy perturbation method and the method of multiple scales are utilized to find analytic solutions to the steady-state motion of the microbeam, far from pull-in. The effects of different design parameters on dynamic behavior are discussed. The results obtained by the presented method are validated by comparing with literature.

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