This paper investigates electrostatically actuated resonator micro-sensor response near natural frequency. The Casimir effect is included. Both the electrostatic force and the Casimir force introduce nonlinearities in the system. Hamilton’s principle is used to derive the partial-differential equation of motion for the general case of nonuniform sensors. The method of multiple scales is then used in a direct approach of the problem. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform capacitive resonator micro-sensors are provided.
- Design Engineering Division and Computers in Engineering Division
On Nonlinear Response of Capacitive Sensors
Caruntu, DI, & Knecht, M. "On Nonlinear Response of Capacitive Sensors." Proceedings of the ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. Volume 6: ASME Power Transmission and Gearing Conference; 3rd International Conference on Micro- and Nanosystems; 11th International Conference on Advanced Vehicle and Tire Technologies. San Diego, California, USA. August 30–September 2, 2009. pp. 531-538. ASME. https://doi.org/10.1115/DETC2009-86144
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