Design Optimization of a Linear-Motion Large-Displacement Micro Mechanism for High Off-Axis Stiffness

This paper presents research on the large-displacement linear-motion planar compliant mechanism (X-Bob) specific to MEMS applications. The X-Bob’s potential for high off-axis stiffness makes it a strong candidate for precision MEMs applications. Understanding the characteristics and performance of the X-Bob can lead to the ability to modify it to fit specific applications. In this work, an X-Bob design is optimized for increased off-axis stiffness while maintaining a small footprint. The results are compared to previous X-Bob designs and to folded beam suspensions. Advantages and disadvantages of each design are explained.