MEMS Gyroscopes Susceptibility to High Frequency Acoustic Noise

MEMS gyroscopes are becoming more prevalent in inexpensive inertial measurement units used in a variety of harsh environments. It has been shown in previous studies that high power high frequency acoustic noise can have a detrimental effect on these devices. This study examines the threshold of the sound power levels required at these high frequencies to generate detrimental effects on the output of MEMS gyroscopes. This study provides basic background work for further research into mitigation techniques for higher powered high frequency acoustic noise.