Atomic force microscope (AFM) based anodization nanolithography generates nanoscale oxide patterns on a silicon substrate in a serial fashion. The design of a custom AFM system allows for the controlled deposition of oxide patterns in the 100 nm regime. Anisotropic etching of the substrates results in raised micro- and nanostructures. The resulting master patterns are shown to be useful for the molding of stamps for soft lithographic patterning at the nanoscale. The simplicity of this method enables prototypical investigation of new materials and processes for soft lithographic research.

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