Linear micro motors lend themselves to being fabricated in a hybrid fashion, i.e. fabricating stator and traveler on separate wafers. While such an approach provides substantial flexibility in fabricating the micro components, it requires to coming up with an appropriate guide system, as well as an assembly process for system integration. This process has to assure that the most critical dimension (typically the air gap between stator and traveler) is achieved. In general, such a challenge is best met by a self-alignment assembly process. The first generation of linear actuators used an assembly process where a ball guide consisting of ground V-grooves and 200 μm ruby balls was created. Both micro step motors and micro synchronous motors were equipped with such guides, which proved to be quite reliable. However, to further minimize friction, future linear micro motors will feature magnetic levitation bearings. This paper presents an assembly process for such micro motors.

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