The elastic dynamic performances are studied for a piezodriven 3-DOF compliant precision micro-positioning stage with flexure hinges. Firstly, the dynamic equations of motion of the system are developed. The flexure hinges are modeled by using the varying section frame element, and the element stiffness and mass matrices are presented. Secondly, the lower order modal frequencies and damping factors are experimentally identified and the analysis model is proved to be feasible. Finally, an input-tuning concept aimed to improve dynamic actuation performances is proposed. The quintic tuning function is employed in the dynamic analysis for the system. Simulation results show that the residual vibration and the input couplings induced by the inputs are improved significantly after the tuning function is applied during actuation.

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