This paper introduces the force analysis of the XYZ Micromanipulator (XYZM). The XYZM has three independent linear inputs and a positioning platform. The positioning platform remains horizontal throughout its motion and has translation in the x, y, and z directions. The design and displacement analysis for the XYZM was reported previously. This paper concentrates on the input-output force relationships and the derivation of the XYZM kinematic coefficients. Equations for the three versions of the XYZM are reported and sample results provided. Slider displacements of 45 micrometers result in a predicted out-of-plane displacement of 188 micrometers for the rigid-body XYZM and 262 micrometers for the compliant XYZM. This correlates to output force of 286 micronewtons with an input force of 150 micronewtons for the rigid-body XYZM and 261 micronewton output force with an input force of 150 micronewtons for the compliant XYZM.

This content is only available via PDF.
You do not currently have access to this content.