This paper presents research on the strain at fracture of polysilicon at the micro scale. Compliant mechanisms and cantilever beams were tested to failure, the deflection measured, and the strain calculated. The results of three studies are given and the culmination of all three is presented in this paper. The information on the fracture strain and the associated uncertainty can be used to provide conservative strength estimates that can be used in design of compliant mechanisms in MEMS.

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