Rapid prototyping of millimeter- to micron-scale mechanical parts was obtained by selective Laser Induced Chemical Vapor Deposition (LCVD) onto a computer controlled five degree of freedom substrate. A description of Rensselaer’s experimental apparatus for 3-dimensional rapid prototyping is given. Details of the (LCVD) system are presented as well as the experimental approach taken. We illustrate our purpose with sample carbon micro-structures obtained during system calibration. By virtue of the process selected, the range of material that can be deposited is as large as there are organometallic precursors for them. Many ceramics, intermetallics, metals, and possibly some polymers can be grown via this method.