Abstract

Particle transport and deposition in a CVD chamber and a horizontal diffusion furnace are studied. Mean flow and thermal fields are simulated using GENFLOW, which is a general computer code for fluid flow and heat transfer computations. Trajectories of aerosol particles in the chamber and the furnace are evaluated by solving the corresponding Lagrangian equation of motion that includes effects of temperature, drag, gravity, Brownian motion and turbulence fluctuations generated during pumping or venting. Aerosol particles are released at the gas inlet and are carried towards the wafers with sizes of 0.05–1.0 micron in the CVD chamber and 1.0 micron in the diffusion furnace. Depositions of particles on the wafer, wafer temperature and inlet turbulence intensity are evaluated.

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