The Deposition Behavior of Fine Glass Particle of PCVD

In the present study, the CFD method was used to investigate the flow field and temperature field distribution in the glass deposition furnace. Combined with the DPM model, the motion of fine glass particle inside the furnace are also studied. The results shows that there exists a large temperature gradient in the furnace and glass sedimentary basement. The glass particles with larger diameter are easier to deposit on the sedimentary basement. Meanwhile, the larger particles are easier to deposit on the left side of furnace wall, while the smaller particles are easier to deposit on the thin pipe entrance. Both the larger and smaller particle can deposit on the right side of the furnace. The injection angle of plasma has a great effect on the temperature and flow field.