This paper proposes a universal graphical tool for the modeling and reliability analysis of complex industrial process system based on Multilevel Flow Models (MFM). An Extensible Markup Language (XML) is used for structuring the MFM model. An editor is developed and an executor can implement reliability analysis in terms of the established MFM models. The proposed reliability analysis tool is meaningful for further research of the MFM based system reliability analysis and will be useful for more practical applications such as online risk monitoring by integrating the existed algorithms of alarm analysis and fault diagnosis based on MFM.

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