Processing technique of micro grooves and channels is very important to study the phenomenon of fluids in micro scale. Micro grooves and microchannels play an important role in various devices, such as μ-TAS (Micro-Total Analysis Systems) and micro reactors.
Laser processing is currently widely used for drilling and grooving of various materials including metals, polymers, glasses and composite materials, since laser machining can avoid the problems that conventional machining methods have. For example wear of a working tool, lowering of processing accuracy, and wear debris becoming contaminants are some of the problems of the conventional method. Additionally, compared to other non-contact machining processes such as electron beam machining (EBM) and focused ion beam (FIB), machining a vacuum is not required. Therefore, applicability is wider and setup costs can be more economical.