The main objective of this work is to evaluate the pressure loss at low subsonic rarefied flow through a microfilter having different opening shapes. As is known, a filter with a lower pressure drop is more suitable for different industrial and medical applications. We use our own developed DSMC solver, i.e., 3D MONIR-DSMC code to lunch our study. MONIR uses the NTC (no-time-counter) scheme to model the collision process. The VHS model is also chosen to simulate collision between particle pairs. The Opening factor which is known as one of the most important parameters affecting the microfilter design, is taken constant. The results show that the pressure drop for a rectangular holes is greater than the other hole shapes. Also, the hexagonal hole shapes provide efficient manners compare with circular, rectangular and cubic hole shapes, considering constant opening factor and hydraulic diameter magnitudes.

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