For gas flows in micro devices, the molecular mean free path is of the same order as the characteristic scale making the Navier-Stokes equation invalid. Recently, some micro gas flows are simulated by the DS-BGK method, which is convergent to the BGK equation and very efficient for low-velocity cases. As the molecular reflection on the boundary is the dominant effect compared to the intermolecular collisions in micro gas flows, the more realistic boundary condition, namely the CLL reflection model, is employed in the DS-BGK simulation and the influence of the accommodation coefficients used in the molecular reflection model on the results are discussed. The simulation results are verified by comparison with those of the DSMC method as criteria.

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