Liquid Squeeze Film Damping in Microsystems Applications

Squeeze film damping (SFD) in microscale systems employing plates parallel to a substrate and operating in a liquid environment is theoretically investigated. Previous analytical or numerical studies of SFD in microsystems are mainly focused on devices working in a compressible fluid, such as air [1–3], where fluid inertia is negligible. However, liquid inertia appears to significantly affect the dynamic response of a microsystem operating in liquid environment. This paper outlines a theoretical framework that takes into account the inertia effects on dynamic response and illustrates this effect presenting the magnification factor for media with high and low density.