Squeeze film damping (SFD) in microscale systems employing plates parallel to a substrate and operating in a liquid environment is theoretically investigated. Previous analytical or numerical studies of SFD in microsystems are mainly focused on devices working in a compressible fluid, such as air [1–3], where fluid inertia is negligible. However, liquid inertia appears to significantly affect the dynamic response of a microsystem operating in liquid environment. This paper outlines a theoretical framework that takes into account the inertia effects on dynamic response and illustrates this effect presenting the magnification factor for media with high and low density.

This content is only available via PDF.
You do not currently have access to this content.