We present experiments on the isothermal gas flow at relatively high Mach numbers in microfabricated channels of small aspect ratios. The microchannels were fabricated by deep etching on silicon wafers, bonded to a Pyrex wafer to cover and seal them; the microchannels were 10 microns deep with a variety of widths. The accurate determination of the small flow rates was performed by measuring the displacement of a bead of mercury in a precision bore glass tube in a controlled environment. The experiment setup has been specially designed to account for inlet and outlet loss. The inferred friction coefficient at different values of Knudsen, Reynolds and Mach numbers shows that the flow inside the microchannel follows the classical laminar behavior over the range of experiments.
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ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels collocated with 3rd Joint US-European Fluids Engineering Summer Meeting
August 1–5, 2010
Montreal, Quebec, Canada
Conference Sponsors:
- Fluids Engineering Division
ISBN:
978-0-7918-5450-1
PROCEEDINGS PAPER
Compressible Microchannel Flow Available to Purchase
Gholamreza Mirshekari,
Gholamreza Mirshekari
University of Sherbrooke, Sherbrooke, QC, Canada
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Martin Brouillette
Martin Brouillette
University of Sherbrooke, Sherbrooke, QC, Canada
Search for other works by this author on:
Gholamreza Mirshekari
University of Sherbrooke, Sherbrooke, QC, Canada
Martin Brouillette
University of Sherbrooke, Sherbrooke, QC, Canada
Paper No:
FEDSM-ICNMM2010-30399, pp. 433-441; 9 pages
Published Online:
March 1, 2011
Citation
Mirshekari, G, & Brouillette, M. "Compressible Microchannel Flow." Proceedings of the ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels collocated with 3rd Joint US-European Fluids Engineering Summer Meeting. ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels: Parts A and B. Montreal, Quebec, Canada. August 1–5, 2010. pp. 433-441. ASME. https://doi.org/10.1115/FEDSM-ICNMM2010-30399
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