We present the design; fabrication and testing of a Polydimethylsiloxane (PDMS)-based microfluidic pump with optically induced membrane actuation. The thin membrane consists of a layer of PDMS (100 μm) and a layer of carbon nanotubes (190 nm). An applied infrared laser opto-mechanically activates the film of carbon nanotubes (CNT), leading to membrane deformation and subsequent fluid motion. Photomechanical actuation offers an alternative way to drive microfluidic devices and provides distinct advantages over alternative methods. The advantages include simplistic, low-cost device fabrication, Wireless actuation, remote controllability electrical–mechanical decoupling, low noise and the elimination of electrical circuits. The performance of this pump in terms of pressure head and flow rate is substantially high. In addition, the micro pump is self-priming and insensitive to particles and bubbles in the pumped media.

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