This paper concern is to study the gas properties effect in flow and heat transfer behaviors through microchannels using the direct simulation Monte Carlo method. The flow is rarefied and supersonic. The channels are investigated at two different inlet boundary conditions. The collision process is modeled using the NTC (no-time-counter) scheme. The VHS model is chosen to simulate collision between particle pairs. The study is provided for many different gases including nitrogen, helium, and oxygen. The Knudsen number is chosen in a manner to provide slip flow through the channel. The results show that the heat transfer from the wall is lower for heavier gases. A comparative study among the monatomic, diatomic, polyatomic gases shows that the heat transfer rate is lower for the polyatomic gases. The result shows that, the heat transfer from the wall is lower for the heavier gases than that for the lighter gas. For a fixed Mach number, the heat transfer from the wall decreases as the molecular diameter increases.

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