In this paper, the fluid flow and heat transfer characteristics of two-dimensional micro/nanochannel flows are examined. The Direct Simulation Monte Carlo (DSMC) method for molecular gas dynamics is utilized to simulate the gas flows through two-dimensional micro/nanochannel. The collision process has been treated in a statistical way using the no-time-counter (NTC) scheme and the variable hard sphere (VHS) model has been employed to simulate the collision from the kinetic viewpoint. Results revealed that the temperature and velocity distributions have an unequalled behavior and may have a significant effect on the advancement and the design of MEMS and NEMS.

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