Single-Nozzle Micropumps

We demonstrate a new design of valveless micropump with a single nozzle and driven by piezoelectric disk. The nozzle is formed by a planar channel with an acoustic resonator profile, and the pump is fabricated by lamination of layers made of polymethyl-methacrylate (PMMA) and dry adhesives. Both experimental characterization and numerical simulation show that pump works well at low frequency in terms of relatively high pressure head and flowrate. Moreover, the pumping flow direction can be altered by simply adding buffer areas at the inlet and outlet. The pump is suitable for microfluidic integrations.