Microscale fluid dynamics has received intensive interest due to the emergence of microelectromechanical systems (MEMS) technology. Fluid flow in microdevices has some characteristics which one of them is rarefaction effect related with gas flow. In this work, the steady state laminar rarefied gas flow in the entrance region of parallel plate microchannels is investigated by the integral method with slip flow conditions at solid surface. The effects of Knudsen number on friction factor and Nusselt number are presented in graphical form as well as analytical form. Also the effect of Knudsen number on hydrodynamic entry length is presented. The results show that as Knudsen number increases the local friction factor and Nusselt number decrease. Also an increment of Knudsen number leads to a larger amount of hydrodynamic entry length.

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