Novel Inorganic Polymer Derived Microfluidic Devices: Materials, Fabrication, Microchemical Performance

We introduce the successful fabrication of inorganic polymer derived microchannels with organic solvent resistance and optical transparency, via economic micro-molding process by using two types of source materials: commercial polyvinylsilazane (HTT1800 Kion Corp.), or allylhydropolycarbosilane (SMP-10, Starfire Co.). And we demonstrated the reliable microchemical performance in various organic solvents such as THF, DMF and acetonitrile at elevated temperatures. Knovenagel and Diels-Alder reactions were successfully run by pressured-driven flow in 2 cm and 16 cm long channel, respectively. It is proven that the developed inorganic polymer-based microchannels were obviously performed as a niche material-based microfluidic device between plastic and glass based device. In addition, we present the fabrication and characterization of ceramic microreactors composed of inverted beaded silicon carbide (SiC) monoliths with interconnected pores as catalyst supports, integrated within high-density alumina housings obtained via an optimized gel-casting procedure. These tailored macroporous SiC monoliths deposited Ru as a catalyst was run for the decomposition of ammonia with at temperatures between 450 and 1000 °C, which demonstrated a high temperature fuel cell reformer.