An experimental investigation in a single silica microtube in isothermal stationary flow for various gases is made from the hydrodynamic to the near free molecular regime to study the reflection/accommodation process at the wall. This kind of investigation requires, more than other Micro-Electro-Mechanical-Systems (MEMS) experiments, a powerful experimental platform to measure very small mass flow rate. A global analytic expression, based on the Navier-Stokes (NS) equations with second order boundary conditions, is used to yield the Tangential Momentum Accommodation Coefficient (TMAC) in 0.003–0.3 Knudsen number range. Otherwise, the experimental results of the mass flow rate is compared with theoretical values calculated from kinetic approaches using variable TMAC as fitting parameter over the 0.3–30 Knudsen number range. Finally, whatever the theoretical approach the TMAC values obtained from the different gas-surface pairs are rather close one to other, but the TMAC values seem decreasing when the molecular mass increases.
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ASME 2008 6th International Conference on Nanochannels, Microchannels, and Minichannels
June 23–25, 2008
Darmstadt, Germany
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4834-5
PROCEEDINGS PAPER
Mass Flow Rate Measurements: From Hydrodynamic to Free Molecular Regime
Timothe´e Ewart,
Timothe´e Ewart
Institut de Me´canique des Fluides de Toulouse, Toulouse, France
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Irina A. Graour,
Irina A. Graour
Universite´ de Provence, Marseille, France
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Pierre Perrier,
Pierre Perrier
Universite´ de Provence, Marseille, France
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J. Gilbert Me´olans
J. Gilbert Me´olans
Universite´ de Provence, Marseille, France
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Timothe´e Ewart
Institut de Me´canique des Fluides de Toulouse, Toulouse, France
Irina A. Graour
Universite´ de Provence, Marseille, France
Pierre Perrier
Universite´ de Provence, Marseille, France
J. Gilbert Me´olans
Universite´ de Provence, Marseille, France
Paper No:
ICNMM2008-62177, pp. 65-73; 9 pages
Published Online:
June 11, 2009
Citation
Ewart, T, Graour, IA, Perrier, P, & Me´olans, JG. "Mass Flow Rate Measurements: From Hydrodynamic to Free Molecular Regime." Proceedings of the ASME 2008 6th International Conference on Nanochannels, Microchannels, and Minichannels. ASME 2008 6th International Conference on Nanochannels, Microchannels, and Minichannels. Darmstadt, Germany. June 23–25, 2008. pp. 65-73. ASME. https://doi.org/10.1115/ICNMM2008-62177
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