This paper investigates the fabrication processes of polymer micro channels integrated into flow cells. The cross sectional dimensions of these flow cell channels are in the range of microns containing structures or structure details in the submicron range. Single-component and double-component cells are presented. Single-component cells are entirely made of one polymer. They are composed of a micro structured substrate and a cover plate to hermetically seal the subjacent microfluidic structures. Flexible fluidic ports are added to facilitate interfacing. Polymethylmethacrylate (PMMA) is used as an industrially prefabricated foil (HESA®Glas VOS; HESA®Glas HESAlite). Double-component cells are made of spincoated PMMA (MicroChem 950k PMMA A11; AllResist GmbH 950k PMMA A9) that is micro structured on glass substrates prior to sealing with a cover plate. PMMA enables high resolution direct lithographic patterning of the fluidic structures. We apply Deep UV Lithography (DUV) to photochemically degrade PMMA and subsequently dissolve the degraded areas in an organic solvent. This process had previously primarily been utilized to pattern polymer waveguides. For minimum feature size devices, initial samples have been fabricated applying Deep X-Ray Lithography (DXRL) instead of DUV. Final sealing with PMMA cover plates is performed using thermal and UV bonding or solvent welding.

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