A thin film pellistor is under development at IMM for the selective detection of carbon monoxide in hot gas flows. The selective methanation reaction of carbon monoxide to methane is applied to generate chemical heat of reaction, which is then detected by direct measurement of thermal conductivity. The chemical reaction is performed over a nickel/calcium oxide/alumina catalyst, which is directly deposited onto a silicon nitride membrane being part of the sensor.
Volume Subject Area:Biomedical
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