A microchannel heat sink, integrated with pressure and temperature microsensors, is fabricated to study convective boiling under uniform heat flux boundary condition. Utilizing a wafer bond and etch back technology, the heat source, temperature and pressure sensors are separated from the fluid flow by a membrane only 1.5μm in thickness; thus, allowing good control of the thermal boundary conditions. Temperature and pressure distributions for various power levels and flow rates are measured while, simultaneously, the flow patterns are recorded. Single-phase flow results, compared with numerical simulations, confirm that the heat flux boundary condition is indeed nearly uniform. The sensor arrays, particularly for two-phase flow, provide the spatial and temporal dependence of both the temperature and pressures fields.
- Nanotechnology Institute
Boundary Conditions and Integrated Sensors in Microchannel Convective Heat Transfer
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Lee, M, Cheung, LSL, Lee, Y, & Zohar, Y. "Boundary Conditions and Integrated Sensors in Microchannel Convective Heat Transfer." Proceedings of the ASME 4th International Conference on Nanochannels, Microchannels, and Minichannels. ASME 4th International Conference on Nanochannels, Microchannels, and Minichannels, Parts A and B. Limerick, Ireland. June 19–21, 2006. pp. 1365-1371. ASME. https://doi.org/10.1115/ICNMM2006-96117
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