Parallel-plate and transverse comb-drive types of electrostatic microactuators are commonly used MEMS-based devices. Although they have the advantages of favorable scaling, fast response, and low power consumption, these electrostatic microactuators have had a fundamental limitation in that the allowable travel range is limited to 1/3 of the total gap between comb capacitor plates. Travel beyond this allowable range results in “pull-in” instability, independent of mechanical design parameters such as stiffness and mass. This paper presents the extension of stable travel ranges through the development of an active control system that stabilizes electrostatic microactuators and allows travel almost over the entire available gap between comb capacitor plates, providing a practical approach to extending travel range of electrostatic microactuators for applications that require high fill factors. The addressed challenges include the nonlinear dynamics of microactuators and system parameters that vary among fabricated devices. A nonlinear model inversion technique was proposed to address the nonlinear dynamics, which allows the use of traditional linear controller design methodologies for obtaining a desired linear system response. An adaptive controller was developed to provide improved position tracking in the presence of device parameter variations caused by fabrication imperfections. For experimental verification, the control system was implemented on a transverse comb-drive electrostatic microactuator fabricated using deep reactive ion etching on silicon-on-insulator wafers. Experimental results demonstrate that the resulting system is capable of traveling 4.0μm over a 4.5μm full range without “pull in.” Satisfactory tracking performance was obtained over a wide frequency band.
Skip Nav Destination
ASME 3rd International Conference on Microchannels and Minichannels
June 13–15, 2005
Toronto, Ontario, Canada
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4185-5
PROCEEDINGS PAPER
Pull-In Extension of MEMS Electrostatic Microactuators Using an Active Control Method
D. Piyabongkarn,
D. Piyabongkarn
University of Minnesota, Minneapolis–St. Paul, MN
Search for other works by this author on:
R. Rajamani,
R. Rajamani
University of Minnesota, Minneapolis–St. Paul, MN
Search for other works by this author on:
B. J. Nelson
B. J. Nelson
Swiss Federal Institute of Technology, Zurich, Switzerland
Search for other works by this author on:
Y. Sun
University of Toronto, Toronto, ON, Canada
D. Piyabongkarn
University of Minnesota, Minneapolis–St. Paul, MN
R. Rajamani
University of Minnesota, Minneapolis–St. Paul, MN
B. J. Nelson
Swiss Federal Institute of Technology, Zurich, Switzerland
Paper No:
ICMM2005-75207, pp. 273-279; 7 pages
Published Online:
November 11, 2008
Citation
Sun, Y, Piyabongkarn, D, Rajamani, R, & Nelson, BJ. "Pull-In Extension of MEMS Electrostatic Microactuators Using an Active Control Method." Proceedings of the ASME 3rd International Conference on Microchannels and Minichannels. ASME 3rd International Conference on Microchannels and Minichannels, Part B cont’d. Toronto, Ontario, Canada. June 13–15, 2005. pp. 273-279. ASME. https://doi.org/10.1115/ICMM2005-75207
Download citation file:
6
Views
Related Proceedings Papers
Related Articles
Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties
J. Dyn. Sys., Meas., Control (November,2007)
Nonlinear Dynamics of a Micro-Electro-Mechanical System With Time-Varying Capacitors
J. Vib. Acoust (January,2004)
Model Reduction for Control System Design
Appl. Mech. Rev (September,2001)
Related Chapters
The Design and Implement of Remote Inclinometer for Power Towers Based on MXA2500G/GSM
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
Producibility Engineering
Manufacturing Engineering: Principles for Optimization, Third Edition
Platform Technologies
Computer Aided Design and Manufacturing