In this paper, the trends and successful patterns of interdisciplinary research activities integrating thermofluid engineering and MEMS technology are discussed, through a review of recent works presented in Japan. The possible combinations of the styles of research and the roles played by these disciplines are paid attentions. Among these combinations, the patterns where “MEMS provides solutions to thermofluid problems” are considered as the main issue. Three typical forms of utilization of MEMS technology in experimental thermofluid research are focused; structural elements of test sections (microchannels), physical surface modification (artificial cavities and surface texturing) and sensors and actuators. Examples for these forms of studies are given, and the current directions of evolution and the challenges are overviewed.

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