An experimental model of Joule-Thomson micro-cooler has been fabricated on silicone wafer of 39mm×15.5mm in size. The micro-cooler uses ethylene as the refrigerant and it works in the pressure range between 2.3MPa and 0.1MPa. The micro-cooler consist of condenser, evaporator and capillary tube. Flow passage of the refrigerant was fabricated by etching process. Peltier device was used to pre-cool and condense the refrigerant. Temperature decrease by 3K was obtained at maximum flow rate of 3mg/s.

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