Heat Transfer and Film Dynamic in Shear-Driven Liquid Film Cooling System of Microelectronic Equipment

The conjugated two-dimensional model, based on long-wave theory, of a steady laminar flow of liquid film and co-current gas flow in plane channel with the height varied from 150 to 500 μm is performed. A chip with the several millimeters length is located on the bottom wall of channel. The linearised approximation of the problem is obtained analytically. Numerical calculations are executed for liquid FC-72 and Nitrogen gas flow. In contrast to a case of a large channel, there is essential an influence of liquid film deformations on pressure and velocity in a gas phase.