This work presents an active Micro Heat Spreader (MHS) for use in electronic cooling. The device includes four reservoir chambers and is actuated using membrane deflection. An investigation is performed using Finite Element Analysis to determine the performance characteristics of the MHS. Two operating conditions for the actuation order of the membranes are considered. Dimensional similitude is used to obtain a single maximum temperature versus Reynolds number curve for the device at the given operating condition and Prandtl number. Fabrication of the MHS is proposed using the Silicon-on-Insulator (SOI) technique and actuation of the membranes can be achieved using thin film PZT.

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