In this work we have deposited SiC at 1300°C with the addition of small amounts of propylene. The use of propylene and high concentrations of methyltrichlorosilane (9 vol%) allowed the deposition of superhard SiC coatings (42 GPa). The superhard SiC could result from the presence of a SiC-C solid solution, undetectable by X-ray diffraction but visible by Raman spectroscopy. Another sample obtained by the use of 50 vol% Argon, also showed the formation of SiC with good properties. The use of a flat substrate together with the particles showed the importance of carrying out the analysis on actual particles rather than in flat substrates. We show that it is possible to characterize the anisotropy of PyC by Raman spectroscopy.

This content is only available via PDF.
You do not currently have access to this content.