An experimental system for single-phase gas flow in microchannels was set up. The effects of viscous heating on the temperature field in the flow were studied experimentally. Also, a theoretical model for the flow and heat transfer in the slip flow region was developed and the resulting equations were solved analytically by using a method based on the superposition principle. The results obtained agree well with the experimental data. The study also provides greater insight into microchannel flow and the associated heat transfer.

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