Using the time–resolved thermoreflectance technique, the thermal conductivity of CoFe films are measured with various thicknesses and the results show a thickness-dependent thermal conductivity. In order to overcome the obstacle for the high thermal conductivity metal film measurement, a thermal barrier (SiNx) is added between the metal film and Si substrate.

Volume Subject Area:
Theory and Fundamental Research
Keywords:
thermal conductivity, CoFe film, thickness dependence, thermoreflectance, pump-probe method, thermal barrier
Topics:
Cobalt, Iron, Thermal conductivity, Thermal conductivity measurement, Thermoreflectance, Thin films
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