This paper reports experimental investigation of the scaling effect on thermal transport in platinum nanoheaters deposited on a single crystalline silicon substrate. The size dependency of the thermal resistances of nanoheaters with dimensions from 5 μm down to 100 nm is experimentally obtained. Additional Joule heating and electrical resistance thermometry in heater/sensor pairs of various dimensions and spacing (100 nm to 400nm) are carried out in order to study the temperature distribution in the vicinity of these nanoheaters. The results of these two sets of measurements confirm that the thermal resistances of smaller nanoheaters are dominated by the interface resistance between the platinum and silicon substrate. Furthermore, analytical solutions of the BTE around a hot spot are used to evaluate and examine the significance of the localized heating or sub-continuum transport around a hotspot.
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ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference collocated with the ASME 2007 InterPACK Conference
July 8–12, 2007
Vancouver, British Columbia, Canada
Conference Sponsors:
- Heat Transfer Division
ISBN:
0-7918-4275-4
PROCEEDINGS PAPER
Experimental Investigation of Scaling Effect on Thermal Transport in Nanoscale Hotspots Available to Purchase
Keivan Etessam-Yazdani,
Keivan Etessam-Yazdani
Carnegie Mellon University, Pittsburg, PA
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Mehdi Asheghi,
Mehdi Asheghi
iCONA Technology, Palo Alto, CA
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Hendrik F. Hamann
Hendrik F. Hamann
IBM T.J. Watson Research Center, Yorktown Heights, NY
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Keivan Etessam-Yazdani
Carnegie Mellon University, Pittsburg, PA
Mehdi Asheghi
iCONA Technology, Palo Alto, CA
Hendrik F. Hamann
IBM T.J. Watson Research Center, Yorktown Heights, NY
Paper No:
HT2007-32868, pp. 349-356; 8 pages
Published Online:
August 24, 2009
Citation
Etessam-Yazdani, K, Asheghi, M, & Hamann, HF. "Experimental Investigation of Scaling Effect on Thermal Transport in Nanoscale Hotspots." Proceedings of the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference collocated with the ASME 2007 InterPACK Conference. ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference, Volume 2. Vancouver, British Columbia, Canada. July 8–12, 2007. pp. 349-356. ASME. https://doi.org/10.1115/HT2007-32868
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