The Experimental Study on High Temperature Air Combustion and CF₄ Decomposition

For the purpose of decomposing the processing gases CF₄ from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF₄. The preheat air temperature of it is above 900 °C. The exhaust gas released into the atmosphere is lower than 150 °C. Moreover, the efficiency of recovery of waste heat is higher than 70%, the NO_x level in exhaust gas is less than 300 mg/m³ and the distribution of temperature in the furnace is nearly uniform. The factors influencing heat transfer, temperature profile in chamber and NO_x emission were discussed. Also some CF₄ can be decomposed in this system. Experimental results indicated that the destruction removal efficiency (DRE) of CF₄ increases with the increasing of concentration of H₂O in some scale, and will not keep climbing when the concentration reach a point. DRE of CF₄ decreases with the decreasing of concentration of CF₄ under condition of other factors unchanged.