Heat loss through surrounding air has important thermal effect on microfabricated structures. This effect is generally modeled as a natural convection boundary condition. However, how to determine the convective coefficient (h) at microscales is a debate. In this paper, a micro heater is fabricated on a suspended thin film membrane. The natural convection is investigated using the 3-omega measurements and complex analytical modeling. It is found that h seems larger than that at larger scales; however, it is also proved that the increased h is actually contributed by heat conduction instead of heat convection. A method of determining the phenomenal h that can be used for microfabricated structures is proposed by using the heat conduction shape factor.
- Heat Transfer Division and Electronic and Photonic Packaging Division
Investigation of the Natural Convection Boundary Condition in Microfabricated Structures
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Hu, X, Jain, A, & Goodson, KE. "Investigation of the Natural Convection Boundary Condition in Microfabricated Structures." Proceedings of the ASME 2005 Summer Heat Transfer Conference collocated with the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems. Heat Transfer: Volume 1. San Francisco, California, USA. July 17–22, 2005. pp. 641-644. ASME. https://doi.org/10.1115/HT2005-72698
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