Atmospheric pressure dc plasma microdischarges were generated between a thin cylindrical electrode and a flat surface. The glow discharges were characterized both experimentally and numerically. As the applied voltage is increased, the plasma potential in the plasma microdischarge remains constant while the plasma current increases proportionally. For the types of electrode materials and the range of the electrode diameters considered, the current-voltage characteristics of the plasma microdischarge are almost independent of the electrode material and the diameter of the electrodes. Predictions from a numerical model of the argon microdischarge compare favorably with the experimental measurements and the visualization studies. The atmospheric pressure plasma microdischarge can be used for deposition of thin films and for microfabrication.
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ASME 2003 Heat Transfer Summer Conference
July 21–23, 2003
Las Vegas, Nevada, USA
Conference Sponsors:
- Heat Transfer Division
ISBN:
0-7918-3695-9
PROCEEDINGS PAPER
Atmospheric Pressure DC Plasma Microdischarges: A Characterization Study Available to Purchase
Jeong W. Yi,
Jeong W. Yi
Drexel University, Philadelphia, PA
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Bakhtier Farouk
Bakhtier Farouk
Drexel University, Philadelphia, PA
Search for other works by this author on:
Jeong W. Yi
Drexel University, Philadelphia, PA
Fang Yan
Drexel University, Philadelphia, PA
Bakhtier Farouk
Drexel University, Philadelphia, PA
Paper No:
HT2003-47511, pp. 325-334; 10 pages
Published Online:
December 17, 2008
Citation
Yi, JW, Yan, F, & Farouk, B. "Atmospheric Pressure DC Plasma Microdischarges: A Characterization Study." Proceedings of the ASME 2003 Heat Transfer Summer Conference. Heat Transfer: Volume 3. Las Vegas, Nevada, USA. July 21–23, 2003. pp. 325-334. ASME. https://doi.org/10.1115/HT2003-47511
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