Miniature PEFC (Proton Exchange Fuel Cell) needs to be supplied with hydrogen of relatively highly purity to produce electricity. Each microstructured metal (stainless steel and aluminum) foil for the purpose of micro reformer was brazed in vacuum for stacking. Inner surfaces of micro channels were coated with Al2O3 layer to support reforming catalysts by solgel method/sputtering (for stainless steel) and anodizing (for aluminum). Stainless steel foil was good to etch and braze, but oxide layer coating on the surface of foil was too difficult to maintain uniformity to induce stable catalytic reaction. On the other hand, aluminum foil was good to control oxide film on the surface and bonded for stacking at low temperature which can avoid catalyst degradation.

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