The fabrication of miniature silicon wafer fuel cells by micro-fabrication technologies and their performance evaluation are presented in this paper. Various thickness of Nafion membranes, such as Nafion 117, 115, and 112, were tested as electrolytes in a miniature single cell operating with dry H2/O2. Among these membranes, Nafion 112 (with the thinnest thickness) gave the best performance of 92.2 mW/cm2 at 250mA/cm2. In order to enhance the output voltage of the fuel cell, a miniature twin-fuel-cell was fabricated in series using two membrane-electrode-assemblies of Nafion 112 membrane sandwiched between two silicon substrates. The novel structure of the miniature twin-fuel-cell is that the electricity interconnect from the cathode of one cell to the anode of another cell is made on the same plane. The interconnect is fabricated by sputtering a layer of gold on the top of the silicon wafer. Silicon dioxide is deposited on the silicon wafer adjacent to the gold layer to prevent short-circuiting between the twin-cells. At ambient conditions, the measured peak power densities of the miniature twin-fuel-cell operating with H2/O2 and 1.5M methanol/O2, are 190.4mW/cm2 and 15.4mW/cm2, respectively.
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Fabrication of Miniature Silicon Wafer Fuel Cells Using Micro Fabrication Technologies
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Yu, J, Cheng, P, Ma, Z, & Yi, B. "Fabrication of Miniature Silicon Wafer Fuel Cells Using Micro Fabrication Technologies." Proceedings of the ASME 2003 1st International Conference on Fuel Cell Science, Engineering and Technology. 1st International Fuel Cell Science, Engineering and Technology Conference. Rochester, New York, USA. April 21–23, 2003. pp. 287-291. ASME. https://doi.org/10.1115/FUELCELL2003-1732
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